Lecture - 27 Plasma Etching Systems

Course Lectures

• Lecture - 1 Introduction on VLSI Design

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• Lecture - 2 Bipolar Junction Transistor Fabrication

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• Lecture - 3 MOSFET Fabrication for IC

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• Lecture - 4 Crystal Structure of Si

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• Lecture - 5 Crystal Structure contd

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• Lecture - 6 Defects in Crystal + Crystal growth

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• Lecture - 7 Crystal growth Contd + Epitaxy I

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• Lecture - 8 Epitaxy II - Vapour phase Epitaxy

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• Lecture - 9 Epitaxy III - Doping during Epitaxy

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• Lecture - 10 Molecular beam Epitaxy

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• Lecture - 11 Oxidation I - Kinetics of Oxidation

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• Lecture - 12 Oxidation II Oxidation rate constants

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• Lecture - 13 Oxidation III - Dopant Redistribution

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• Lecture - 14 Oxidation IV - Oxide Charges

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• Lecture - 15 Diffusion I - Theory of Diffusion

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• Lecture - 16 Diffusion II - Infinite Source

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• Lecture - 17 Diffusion III - Actual Doping Profiles

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• Lecture - 18 Diffusion IV Diffusion Systems

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• Lecture - 19 Ion - Implantation Process

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• Lecture - 20 Ion - Implantation Process

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• Lecture - 21 Annealing of Damages

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• Lecture - 22 Masking during Implantation

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• Lecture - 23 Lithography - I

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• Lecture - 24 Lithography - II

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• Lecture - 25 Wet Chemical Etching

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• Lecture - 26 Dry Etching

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• Lecture - 27 Plasma Etching Systems

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• Lecture - 28 Etching of Si,Sio2,SiN and other materials

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• Lecture - 29 Plasma Deposition Process

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• Lecture - 30 Metalization - I

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• Lecture - 31 Problems in Aluminium Metal contacts

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• Lecture - 32 IC BJT - From junction isolation to LOCOS

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• Lecture - 33 Problems in LOCOS + Trench isolation

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• Lecture - 34 More about BJT Fabrication and Realization

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• Lecture - 35 Circuits + Transistors in ECL Circuits

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• Lecture - 36 MOSFET I - Metal gate vs Self-aligned Poly-gate

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• Lecture - 37 MOSFET II Tailoring of Device Parameters

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• Lecture - 38 CMOS Technology

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• Lecture - 39 Latch - up in CMOS

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• Lecture - 40 BICMOS Technology

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