Lecture - 26 Dry Etching

Course Lectures

• Lecture - 1 Introduction on VLSI Design

  Play
• Lecture - 2 Bipolar Junction Transistor Fabrication

  Play
• Lecture - 3 MOSFET Fabrication for IC

  Play
• Lecture - 4 Crystal Structure of Si

  Play
• Lecture - 5 Crystal Structure contd

  Play
• Lecture - 6 Defects in Crystal + Crystal growth

  Play
• Lecture - 7 Crystal growth Contd + Epitaxy I

  Play
• Lecture - 8 Epitaxy II - Vapour phase Epitaxy

  Play
• Lecture - 9 Epitaxy III - Doping during Epitaxy

  Play
• Lecture - 10 Molecular beam Epitaxy

  Play
• Lecture - 11 Oxidation I - Kinetics of Oxidation

  Play
• Lecture - 12 Oxidation II Oxidation rate constants

  Play
• Lecture - 13 Oxidation III - Dopant Redistribution

  Play
• Lecture - 14 Oxidation IV - Oxide Charges

  Play
• Lecture - 15 Diffusion I - Theory of Diffusion

  Play
• Lecture - 16 Diffusion II - Infinite Source

  Play
• Lecture - 17 Diffusion III - Actual Doping Profiles

  Play
• Lecture - 18 Diffusion IV Diffusion Systems

  Play
• Lecture - 19 Ion - Implantation Process

  Play
• Lecture - 20 Ion - Implantation Process

  Play
• Lecture - 21 Annealing of Damages

  Play
• Lecture - 22 Masking during Implantation

  Play
• Lecture - 23 Lithography - I

  Play
• Lecture - 24 Lithography - II

  Play
• Lecture - 25 Wet Chemical Etching

  Play
• Lecture - 26 Dry Etching

  Playing
• Lecture - 27 Plasma Etching Systems

  Play
• Lecture - 28 Etching of Si,Sio2,SiN and other materials

  Play
• Lecture - 29 Plasma Deposition Process

  Play
• Lecture - 30 Metalization - I

  Play
• Lecture - 31 Problems in Aluminium Metal contacts

  Play
• Lecture - 32 IC BJT - From junction isolation to LOCOS

  Play
• Lecture - 33 Problems in LOCOS + Trench isolation

  Play
• Lecture - 34 More about BJT Fabrication and Realization

  Play
• Lecture - 35 Circuits + Transistors in ECL Circuits

  Play
• Lecture - 36 MOSFET I - Metal gate vs Self-aligned Poly-gate

  Play
• Lecture - 37 MOSFET II Tailoring of Device Parameters

  Play
• Lecture - 38 CMOS Technology

  Play
• Lecture - 39 Latch - up in CMOS

  Play
• Lecture - 40 BICMOS Technology

  Play